TY - CONF AU - Joseph Stroscio AU - E Hudson AU - Steven Blankenship AU - Robert Celotta AU - Aaron Fein C2 - Nanostructure Science, Metrology, and Technology, Gaithersburg, MD DA - 2002-07-01 LA - en M1 - 4608 PB - Nanostructure Science, Metrology, and Technology, Gaithersburg, MD PY - 2002 TI - A Facility for Nanoscience Research: An Overview UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620538 ER -