TY  - JOUR
AU  - Jabez McClelland
AU  - W Anderson
AU  - C Bradley
AU  - M Walkiewicz
AU  - R Deslattes
AU  - E Jurdik
AU  - Robert Celotta
C2  - Journal of Research of the National Institute of Standards and Technology
DA  - 2003-03-01
LA  - en
M1  - 108
PB  - Journal of Research of the National Institute of Standards and Technology
PY  - 2003
TI  - Accuracy of Nanoscale Pitch Standards Fabricated by Laser-Focused Atomic Deposition
ER  -