TY  - GEN
AU  - D Chandler-Horowitz
AU  - N V Nguyen
AU  - J F Marchiando
AU  - P M Amirtharaj
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1993-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.IR.4860
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1993
TI  - Metrologic Support for the DARPANRL-XRL Mask Program::ellipsometric analyses of SiC thin films on Si
ER  -