TY - GEN AU - Knight, Stephen AU - Settle-Raskin, Alice D C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1998-01-01 05:01:00 DO - https://doi.org/10.6028/NIST.IR.5851r1998 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1998 TI - National Semiconductor Metrology Program::project portfolio, FY 1998 ER -