TY - GEN AU - Stephen Knight AU - Joaquin V Martinez de Pinillos AU - Barbara J Belzer AU - Michele Buckley C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 2001-01-01 05:01:00 DO - https://doi.org/10.6028/NIST.IR.6731 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 2001 TI - Silicon microelectronics programs at the National Institute of Standards and Technology::programs, activities, and accomplishments ER -