TY - GEN AU - Yarimbiyik, A Emre AU - Schafft, Harry A AU - Allen, Richard A AU - Zaghloul, Mona E Zaghloul AU - Blackburn, David L C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 2006-01-01 05:01:00 DO - https://doi.org/10.6028/NIST.IR.7234 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 2006 TI - Implementation of simulation program for modeling the effective resistivity of nanometer scale film and line interconnects: ER -