TY  - CONF
AU  - Kin Cheung
AU  - John Suehle
C2  - 213th ECS meeting: Dielectrics for Nanosystems, Phoenix, AZ
DA  - 2008-05-26
LA  - en
PB  - 213th ECS meeting: Dielectrics for Nanosystems, Phoenix, AZ
PY  - 2008
TI  - The Challenge of Measuring Defects in Nanoscale Dielectrics
ER  -