TY  - CHAP
AU  - R Deslattes
AU  - R Mayti
C2  - Handbook of Silicon Semiconductor Metrology, Marcel Dekker Inc, New York, NY
DA  - 2001-07-01
LA  - en
M1  - 27
PB  - Handbook of Silicon Semiconductor Metrology, Marcel Dekker Inc, New York, NY
PY  - 2001
TI  - Analysis of Thin Layer Structures by X-Ray Reflectometry
ER  -