TY  - JOUR
AU  - Barry Bauer
AU  - Eric Lin
AU  - V. Lee
AU  - Haonan Wang
AU  - Wen-Li Wu
C2  - Journal of Electronic Materials
DA  - 2001-04-01
LA  - en
M1  - 30
PB  - Journal of Electronic Materials
PY  - 2001
TI  - Structure and Property Characterization of Low-k Dielectric Porous Thin Films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851702
ER  -