TY  - CONF
AU  - R Davis
AU  - Elizabeth Moore
AU  - Donald Burgess
AU  - Michael Zachariah
C2  - International Conference on Characterization and Metrology for ULSI Technology
DA  - 1998-02-11
LA  - en
PB  - International Conference on Characterization and Metrology for ULSI Technology
PY  - 1998
TI  - A Microcontamination Model for Rotating Disk Chemical Vapor Deposition Reactors
ER  -