TY  - JOUR
AU  - John Gillen
AU  - R King
AU  - B Freibaum
AU  - R Lareau
AU  - J Bennett
AU  - F Chmara
C2  - Journal of Vacuum Science and Technology A
DA  - 2001-04-01
LA  - en
M1  - 19
PB  - Journal of Vacuum Science and Technology A
PY  - 2001
TI  - Negative Cesium Sputter Ion Source for Generating Cluster Primary Ion Beams for Secondary Ion Mass Spectrometry Analysis
ER  -