TY  - CONF
AU  - John Gillen
AU  - S Roberson
AU  - Albert Fahey
AU  - Marlon Walker
AU  - J Bennett
AU  - R Lareau
C2  - Characterization and Metrology for ULSI Technology 2000, International Conference  | | Characterization and Metrology for ULSI Technology |AIP, backfill, -1
DA  - 2001-01-01
LA  - en
M1  - 550
PB  - Characterization and Metrology for ULSI Technology 2000, International Conference  | | Characterization and Metrology for ULSI Technology |AIP, backfill, -1
PY  - 2001
TI  - Cluster Primary Ion Beam Secondary Ion Mass Spectrometry for Semiconductor Characterization
ER  -