TY - JOUR AU - Christopher Stafford C2 - Optical Engineering Magazine DA - 2004-11-01 LA - en M1 - 16(11) PB - Optical Engineering Magazine PY - 2004 TI - A New 'Wrinkle' in Nanometrology UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852408 ER -