TY - JOUR AU - Kao-Shuo Chang AU - Martin Green AU - Jason Hattrick-Simpers AU - John Suehle AU - Ichiro Takeuchi AU - Ozgur Celik AU - S De C2 - IEEE Transactions on Electron Devices DA - 2008-01-24 LA - en M1 - 55 PB - IEEE Transactions on Electron Devices PY - 2008 TI - Determination of Work Functions in the Ta1-xAlxNy/HfO2 Advanced Gate Stack Using Combinatorial Methodology UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851089 ER -