TY  - JOUR
AU  - Chang, Kao-Shuo
AU  - Green, Martin
AU  - Hattrick-Simpers, Jason
AU  - Suehle, John
AU  - Takeuchi, Ichiro
AU  - Celik, Ozgur
AU  - De, S
C2  - IEEE Transactions on Electron Devices
DA  - 2008-01-24
LA  - en
M1  - 55
PB  - IEEE Transactions on Electron Devices
PY  - 2008
TI  - Determination of Work Functions in the Ta<sub>1-x</sub>Al<sub>x</sub>N<sub>y</sub>/HfO<sub>2</sub> Advanced Gate Stack Using Combinatorial Methodology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851089
ER  -