TY - JOUR
AU - Kao-Shuo Chang
AU - Martin Green
AU - Jason Hattrick-Simpers
AU - John Suehle
AU - Ichiro Takeuchi
AU - Ozgur Celik
AU - S De
C2 - IEEE Transactions on Electron Devices
DA - 2008-01-24
LA - en
M1 - 55
PB - IEEE Transactions on Electron Devices
PY - 2008
TI - Determination of Work Functions in the Ta1-xAlxNy/HfO2 Advanced Gate Stack Using Combinatorial Methodology
UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851089
ER -