TY - JOUR AU - Terrence Jach AU - E Landree C2 - Surface and Interface Analysis DA - 2001-08-01 LA - en M1 - 31 PB - Surface and Interface Analysis PY - 2001 TI - Grazing Incidence X-Ray Photoemission Spectroscopy and the Accuracy of Thickness Measurements of CMOS Gate Dielectrics ER -