TY - CONF AU - Ryna Marinenko AU - J Armstrong AU - Shirley Turner AU - Eric Steel AU - F Stevie C2 - Characterization and Metrology for ULSI Technology, International Conference | | Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterization and Metrology for ULSI Technology | AIP, Austin, TX DA - 2003-09-01 LA - en M1 - 683 PB - Characterization and Metrology for ULSI Technology, International Conference | | Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterization and Metrology for ULSI Technology | AIP, Austin, TX PY - 2003 TI - Characterization of SiGe Bulk Compositional Standards with Electron Probe Microanalysis ER -