TY  - JOUR
AU  - Shaw Feng
AU  - Che Joung
AU  - Theodore Vorburger
C2  - International Journal of Nanotechnology
DA  - 2008-10-15
LA  - en
PB  - International Journal of Nanotechnology
PY  - 2008
TI  - Characterization of Probe Dynamic Behaviors in Critical Dimension Atomic Force Microscopy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=824690
ER  -