TY - JOUR AU - R Watts AU - Charles Tarrio AU - Thomas Lucatorto AU - R Madden AU - R Deslattes AU - Ariel Caticha AU - William Estler AU - Christopher Evans AU - T. McWade AU - Joseph Fu AU - Theodore Vorburger C2 - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms DA - 1993-01-01 LA - en M1 - B79 PB - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms PY - 1993 TI - XUV Optics Characterization at the National Institute of Standards and Technology ER -