TY  - CONF
AU  - Theodore Vorburger
AU  - Christopher Evans
AU  - V Tsai
AU  - Joseph Fu
AU  - E.
AU  - Ronald Dixson
AU  - P Sullivan
AU  - T. McWaid
C2  - Proceedings of Japan Society for Precision Engineering: U.S.-Japan Workshop on Soft X-ray Optics: Technical Challenges, T. Namioka, H. Kinoshita, and K. Ito, Editors, Tokyo, -1
DA  - 1997-01-01
LA  - en
PB  - Proceedings of Japan Society for Precision Engineering: U.S.-Japan Workshop on Soft X-ray Optics: Technical Challenges, T. Namioka, H. Kinoshita, and K. Ito, Editors, Tokyo, -1
PY  - 1997
TI  - Finish and Figure Metrology for Soft X­ray Optics
ER  -