TY  - CHAP
AU  - Theodore Vorburger
AU  - John Dagata
AU  - G. Wilkening
AU  - K Iizuka
C2  - Methods of Surface Characterization, Volume 5, Beam Effects, Surface Topography, and Depth Profiling in Surface Analysis, edited by A. W. Czanderna, T. E. Madey, C. J. Powell, Plenum Press, New York, NY
DA  - 1998-01-01
LA  - en
M1  - 5
PB  - Methods of Surface Characterization, Volume 5, Beam Effects, Surface Topography, and Depth Profiling in Surface Analysis, edited by A. W. Czanderna, T. E. Madey, C. J. Powell, Plenum Press, New York, NY
PY  - 1998
TI  - Characterization of Surface Topography
ER  -