TY - JOUR AU - Jun-Feng Song AU - P Rubert AU - Xiaoyu Zheng AU - Theodore Vorburger C2 - Measurement Science & Technology DA - 2008-07-04 LA - en M1 - 19 PB - Measurement Science & Technology PY - 2008 TI - Topography Measurements for Determining the Decay Factors in Surface Replication ER -