TY  - CONF
AU  - Jun-Feng Song
AU  - F Rudder
AU  - Theodore Vorburger
AU  - A Hartman
AU  - Brian Scace
AU  - J Smith
C2  - Proceedings of the 6th International Conference on Metrology and Properties of Engineering Surfaces, Birmingham, -1
DA  - 1994-01-01
LA  - en
PB  - Proceedings of the 6th International Conference on Metrology and Properties of Engineering Surfaces, Birmingham, -1
PY  - 1994
TI  - Microform Calibrations in Surface Metrology
ER  -