TY - JOUR AU - Brent Sperling AU - John Hoang AU - William Kimes AU - James Maslar AU - Kristen AU - Nhan Nguyen C2 - Journal of Vacuum Science and Technology A DA - 2014-04-23 DO - https://doi.org/10.1116/1.4872166 LA - en M1 - 32 PB - Journal of Vacuum Science and Technology A PY - 2014 TI - Time-resolved surface infrared spectroscopy during atomic layer deposition of TiO2 using tetrakis(dimethylamido)titanium and water ER -