TY  - JOUR
AU  - Brent Sperling
AU  - William Kimes
AU  - James Maslar
C2  - Journal of the Electrochemical Society
DA  - 2014-01-07
DO  - https://doi.org/10.1149/2.009403jss
LA  - en
M1  - 3
PB  - Journal of the Electrochemical Society
PY  - 2014
TI  - Quantitative infrared spectroscopy of tetrakis(dimethylamido)titanium for process measurements
ER  -