TY - JOUR AU - Brent Sperling AU - John Hoang AU - William Kimes AU - James Maslar C2 - Applied Spectroscopy DA - 2013-09-10 DO - https://doi.org/10.1366/13-06995 LA - en M1 - 67 PB - Applied Spectroscopy PY - 2013 TI - Time-resolved surface infrared spectroscopy during atomic layer deposition ER -