TY  - JOUR
AU  - Brent Sperling
AU  - William Kimes
AU  - James Maslar
AU  - Pamela Chu
C2  - Journal of Vacuum Science and Technology A
DA  - 2010-06-24
DO  - https://doi.org/10.1116/1.3455187
LA  - en
M1  - 28
PB  - Journal of Vacuum Science and Technology A
PY  - 2010
TI  - Time-resolved Fourier Transform Infrared Spectroscopy of the Gas-phase During Atomic Layer Deposition
ER  -