TY - JOUR AU - John Gillen AU - J Phelps AU - Randall Nelson AU - Peter Williams AU - Steven Hues C2 - Surface and Interface Analysis DA - 1989-04-01 LA - en M1 - 14 PB - Surface and Interface Analysis PY - 1989 TI - Secondary Ion Yield Matrix Effects in SIMS Depth Profiles of Si/Ge Multilayers ER -