TY  - JOUR
AU  - Kevin Lee
C2  - J. Electrochemical Society
DA  - 1990-08-01
LA  - en
M1  - 137
PB  - J. Electrochemical Society
PY  - 1990
TI  - The Fabrication of Thin, Free Standing, Single Crystal, Semiconductor Membranes
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=17207
ER  -