@book{95706,
  author = {John Villarrubia},
  title = {Issues in Line Edge and Linewidth Roughness Metrology},
  year = {2005},
  number = {788},
  month = {2005-01-01},
  publisher = {AIP Press, New York, NY},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822535},
  language = {en},
}