@article{95701,
  author = {John Villarrubia and Andras Vladar and Michael Postek},
  title = {A Simulation Study of Repeatability and Bias in the CD-SEM},
  year = {2005},
  number = {4},
  month = {2005-07-01},
  publisher = {Journal of Microlithography Microfabrication and Microsystems},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822536},
  language = {en},
}