@conference{95621,
  author = {Michael Postek and John Villarrubia and Andras Vladar},
  title = {New Way of Handling Dimensional Measurement Results for Integrated Circuit Technology},
  year = {2003},
  number = {5038},
  month = {2003-05-01},
  publisher = {Proceedings of SPIE, Santa Clara, CA},
  language = {en},
}