@article{95611,
  author = {Egon Marx and I Malik and T Bristow and N Poduje and J Stover and Y Strausser and M Weber},
  title = {Power Spectral Densities: A Multiple Technique Study of Different Si Wafer Surfaces},
  year = {2002},
  number = {20},
  month = {2002-01-01},
  publisher = {Journal of Vacuum Science and Technology},
  language = {en},
}