@conference{95606,
  author = {Egon Marx and James Potzick},
  title = {Simulation of Optical Microscope Images for Photomask Feature Size Measurements},
  year = {2005},
  number = {3B},
  month = {2005-07-03},
  publisher = {2005 Digest of IEEE Antennas and Propagation Society International Symposium, Unknown, USA},
  language = {en},
}