@conference{95601,
  author = {V Tsai and Theodore Vorburger and Ronald Dixson and Joseph Fu and R Koning and Richard Silver and E.},
  title = {The Study of Silicon Stepped Surfaces as Atomic Force Microscope Calibration Standards With a Calibrated AFM at NIST},
  year = {1998},
  month = {1998-01-01},
  publisher = {1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD},
  language = {en},
}