@conference{95596,
  author = {Martin Sohn and Bryan Barnes and Lowell Howard and Richard Silver and Ravikiran Attota and Michael Stocker},
  title = {Koehler Illumination for High-Resolution Optical Metrology},
  year = {2006},
  number = {6152},
  month = {2006-03-01},
  publisher = {Proceedings of SPIE, Santa Clara, CA},
  language = {en},
}