@conference{95531,
  author = {Xuezeng Zhao and Theodore Vorburger and Joseph Fu and Jun-Feng Song and C Nguyen},
  title = {A Model for Step Height, Edge Slope and Linewidth Measurements Using AFM},
  year = {2003},
  number = {683},
  month = {2003-01-01},
  publisher = {Proceedings of American Institute of Physics International Conference on Characterization and Metrology: 2003 International Conference (AIP Conference Proc. 683), edited by D.G. Seiler, et al. (Amer. Inst. Phys, Woodbury NY), Austin, TX},
  language = {en},
}