@conference{95501,
  author = {Ronald Dixson and V Tsai and Theodore Vorburger and Edwin Williams and X Wang and Joseph Fu and R Koning},
  title = {Measurements of Pitch, Height, and Width Artifacts with the NIST Calibrated Atomic Force Microscope},
  year = {1998},
  month = {1998-01-01},
  publisher = {Proceedings of American Society for Precision Engineering, Unknown, USA},
  language = {en},
}