@conference{95481,
  author = {James Potzick},
  title = {Photomask Linewidth Measurement Uncertainty: An Alternative Approach via Stepper Emulation},
  year = {1994},
  number = {10(8)},
  month = {1994-01-01},
  publisher = {Bacus News, SPIE},
  language = {en},
}