@conference{95446,
  author = {Joseph Fu and Ronald Dixson and Ndubuisi Orji and Theodore Vorburger and C Nguyen},
  title = {Linewidth Measurement from a Stitched AFM Image},
  year = {2005},
  month = {2005-01-01},
  publisher = {CP 788 Characterization and Metrology for ULSI 2005, D.G. Seiler et al. eds. (Amer. Inst. Phys., Melville, NY, 2005), Richardson/Dallas, TX},
  language = {en},
}