@conference{95391,
  author = {Ronald Dixson and Ndubuisi Orji and Joseph Fu and Michael Cresswell and Richard Allen and William Guthrie},
  title = {Traceable Atomic Force Microscope Dimensional Metrology at NIST},
  year = {2006},
  number = {6152},
  month = {2006-03-01},
  publisher = {Proceedings of SPIE, San Jose, CA},
  language = {en},
}