@conference{95346,
  author = {Egon Marx and James Potzick},
  title = {Simulation of Optical Microscope Images for Photomask Feature Size Measurements},
  year = {2005},
  month = {2005-01-01},
  publisher = {Proceedings of 2005 Digest of the IEEE Antennas and Propagation Society International Symposium, Unknown, USA},
  language = {en},
}