@conference{95326,
  author = {Richard Silver and Thomas Germer and Ravikiran Attota and Bryan Barnes and B Bunday and J Allgair and Egon Marx and Jay Jun},
  title = {Fundamental Limits of Optical Critical Dimension Metrology: A Simulation Study},
  year = {2007},
  number = {6518},
  month = {2007-01-01},
  publisher = {Proceedings of SPIE, San Jose, CA},
  language = {en},
}