@conference{95321,
  author = {Michael Postek and Andras Vladar and John Kramar and L Stern and John Notte and Sean McVey},
  title = {Instrumentation, Metrology, and Standards for Nanomanufacturing},
  year = {2007},
  number = {6648},
  month = {2007-09-10},
  publisher = {Proceedings of SPIE, San Diego, CA},
  language = {en},
}