@conference{95276,
  author = {Bryan Barnes and Lowell Howard and P Lipscomb and Richard Silver},
  title = {Zero-Order Imaging of Device-Sized Overlay Targets Using Scatterfield Microscopy},
  year = {2007},
  number = {6518},
  month = {2007-03-01},
  publisher = {Proceedings of SPIE, San Jose, CA},
  language = {en},
}