@conference{95251,
  author = {Ronald Dixson and Ndubuisi Orji},
  title = {Comparison and Uncertainties of Standards for CD-AFM Microscope Tip Width Calibration},
  year = {2007},
  number = {6517},
  month = {2007-04-05},
  publisher = {Proceedings of SPIE, San Jose, CA},
  language = {en},
}