@misc{misc,
  author = {Andras Vladar and Michael Postek and John Villarrubia},
  title = {Exploring and Extending the Limits of CD-SEMs\&$\#$39; Resolution},
  year = {2003},
  month = {2003-11-01},
  publisher = {Final report to International SEMATECH},
  language = {en},
}