@conference{95171,
  author = {Richard Silver and Bryan Barnes and Ravikiran Attota and Jay Jun and James Filliben and Juan Soto and Michael Stocker and P Lipscomb and Egon Marx and Heather Patrick and Ronald Dixson and Robert Larrabee},
  title = {The Limits of Image-Based Optical Metrology},
  year = {2006},
  number = {6152},
  month = {2006-03-01},
  publisher = {Proceedings of SPIE, San Jose, CA},
  language = {en},
}