@article{95136,
  author = {Michael Postek and John Villarrubia and Andras Vladar},
  title = {Advanced Metrology Needs for Nanotechnology and Nanomanufacturing},
  year = {2005},
  number = {23},
  month = {2005-11-01},
  publisher = {Journal of Vacuum Science and Technology B},
  language = {en},
}