@conference{95131,
  author = {Ronald Dixson and Michael Cresswell and Richard Allen and William Guthrie and Brandon Park and Christine Murabito and Joaquin Martinez},
  title = {Interim Report on Single Crystal Critical Dimension Reference Materials (SCCDRM)},
  year = {2004},
  month = {2004-01-01},
  publisher = {SEMATECH Internal Report, Unknown, TX},
  language = {en},
}