@misc{95021,
  author = {Andras Vladar and Michael Postek},
  title = {Final Report, 1997-1998 NIST/SEMATECH Collaboration for Improvement of High-Accuracy Critical-dimension Metrology for Semiconductor Manufacturing},
  year = {1998},
  month = {1998-03-30},
  publisher = {NIST/SEMATECH Proprietary Document},
  language = {en},
}